APPARATUS FOR REFINING PROCESS GAS OF FABRICATING SEMICONDUCTOR

摘要

PURPOSE: An apparatus for refining process gas of fabricating a semiconductor is provided to purify the process gas and make the process have ultra high purity by eliminating various impurities like moisture, carbon dioxide, carbon monoxide, hydrogen and methane that are contained in the air. CONSTITUTION: The first pipe(12) is filled with molecular sieve. The second pipes(18) in which alumina balls(24) are installed are formed at both sides of a porous plate(16,17) at both side ends of the first pipe. The third pipes(20) are formed at both sides of filters(26,27) at both side ends of the second pipes. An inflow port(30) of the process gas and an exhaust port(32) of the purified process gas are installed in the intermediate part of the ends of the third pipes.