APPARATUS AND METHOD FOR DETECTING LASER-INDUCED SURFACE FLUORESCENCE

摘要

PURPOSE: An apparatus and a method for detecting laser-induced surface fluorescence are provided to effectively detect laser-induced surface fluorescence by collecting laser-induced surface fluorescence using an oval reflection mirror and a spherical mirror. CONSTITUTION: Light radiated from a laser(21) passes through an incident filter(22) and an opening formed at a middle part of an oval reflection mirror(23), which is positioned between the incident filter(22) and a sample control device(24). The laser(21), the incident filter(22) and the oval reflection mirror(23) are aligned in series in order to allow light to easily pass through. Light passing through the oval reflection mirror(23) is focused on a sample surface fixed to the sample control device(24). At this time, a sample is moved up and down or left and right directions by means of the sample control device(24) in order to allow light to be properly focused on the sample surface. Fluorescent light and scattered light of incident light are reflected from the oval reflection mirror(23) and focused on a space filter(25). The space filter(25) removes noise caused by dust formed on the sample surface. Then, light is converted into horizontal light by passing through a collimator(26). Horizontal light passes through a fluorescent filter(28) so that scattered light is filtered and fluorescent components of horizontal light are incident into a beam detector(27).