LINEAR MOVING DEVICE IN VACUUM

摘要

PURPOSE: A linear moving device is provided in a vacuum state preventing damage by minute particles by friction between units with a low cost. CONSTITUTION: A body portion(10) has flange portions in both sides, and a connecting pipe is installed in the upper part to connect to an outer air. A driving portion(20) is arranged adjacent to the body portion to drive a step motor and a screw. An operating portion(30) receives power from the driving portion to convert a rotation movement to a linear movement. A plurality of units are provided to support the operating portion.