发明名称 PHOTOMASK AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>A photomask (12) and method for manufacturing the same are disclosed. A first material is deposited on at least a portion of a substrate (16) to form a first material layer (18). Before completion of the deposition of the first material, a thermal treatment is applied to the substrate (16) at a temperature greater than approximately 300 degrees Celsius.</p>
申请公布号 WO2003062922(A2) 申请公布日期 2003.07.31
申请号 US2003002281 申请日期 2003.01.24
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