LOW-RIGIDITY FORCE SENSING METHOD AND DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a low-rigidity force sensing device not to be broken by a heavy impact force by using an absorbing/sensing mechanism wherein an impact absorbing means and a force sensing means are integrated. SOLUTION: At least one absorbing/sensing mechanism 3, wherein the impact absorbing means 4 and the force sensing means 5 are integrated, is provided in between two substrates 2a, 2b facing each other to be displaced for a change in the distance in between them when exposed to an impact force. The impact inflicted in between the substrates 2a, 2b is elastically absorbed by the impact absorbing means 4 while the force acting in between the substrates 2a, 2b is sensed by the force sensing means 5. COPYRIGHT: (C)2003,JPO