| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor element transferring device wherein a structure for making pickers for semiconductor elements variable is simplified and variableness of the pickers is accomplished rapidly and precisely. SOLUTION: This transferring device includes a square-shaped frame 101 provided movably on an upper part of a handler body, stators 102a and 104a as well as moving elements 102b and 104b of two linear motors 102 and 104 provided respectively on inside surfaces of two frames 101 neighboring each other, a reference pickup member 120 firmly fixed to a corner part inside the frame 101, first and second pickup members 121 and 122 joined to the moving elements 102b and 104b of the respective linear motors, a first guide member 108, a second guide member 109 making a right angle with the first member 108, and a third pickup member 123 caused to move along the first and second guide members by the movement of the first and second pickup members. COPYRIGHT: (C)2003,JPO
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