ELECTROSTATIC ACTUATOR, DROPLET DISCHARGE HEAD, INK JET RECORDING DEVICE, MICROPUMP, AND OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To achieve a high operating efficiency at low cost. SOLUTION: An insulating film 11 is formed over a diaphragm 10 which serves as a movable part, and a plurality of electrodes electrically insulated from one another and each constructed of an electrically conductive structure are provided on the surface of the insulating film 11. The electrostatic force working part 14B of each of the electrodes 14 is formed by etching a portion of the interior of a channel 37 filled with electrode material. COPYRIGHT: (C)2003,JPO