| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection sensor capable of easily inspecting a disconnection in the middle of a pattern, a partial notch, or a short-circuit to an adjacent pattern, regardless of the shape of a conductive pattern which is an inspection object, for example, even in the case of a branch pattern. SOLUTION: This device is equipped with a holding means for holding information of the reference conductive pattern which is the inspection object, and at least sensor elements having respectively the size below the line width of the conductive pattern which is the inspection object are disposed mutually close matrically. A threshold is set, for binarizing a detection result from a field sensor capable of detecting the field intensity generated from the conductive pattern which is the inspection object to which an inspection signal is supplied (S60). The detection result from the field sensor is binarized (S62) based on the set threshold (S60), and a characteristic point of the binarized binary information is extracted (S66), and compared with the reference conductive pattern information held by the holding means (S68, 70), to thereby determine the quality of the inspection object pattern by the comparison result (S72). COPYRIGHT: (C)2003,JPO
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