| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater which can make the temperature of heated things, such as a silicon wafer, or the like, equalize, can prevent breakage of the silicon wafer, and even when the unexpected temperature change arises, can recover it to the setting temperature in a short time. SOLUTION: The ceramic heater is constituted with a temperature measuring means, which measures the temperature of a ceramic board or a heated thing while a heating element is formed in the surface or the inside of the ceramic board, a control part, which supplies electric power to the above heating element, a memory part, which memorizes the temperature data measured by the above temperature measuring means, and a calculating part, which calculates electric power required for the above heating element from the above temperature data. And, the above heating element is divided into at least two or more circuits, and is constituted so that different electric power may be supplied to the each circuit. COPYRIGHT: (C)2003,JPO
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