| 摘要 |
PROBLEM TO BE SOLVED: To provide a circuit pattern inspection device capable of easily inspecting a disconnection in the middle of a pattern, a partial notch, or a short-circuit to an adjacent pattern, regardless of the shape of a conductive pattern which is an inspection object, for example, even in the case of a branch pattern. SOLUTION: The field intensity generated by the conductive pattern formed on an electronic circuit, to which an inspection signal is provided, is detected by a field sensor, and a field intensity distribution is patterned based on the detection result of the field sensor (S60-S66), and compared with a reference pattern (S68) held beforehand (S70), to thereby determine the quality of the conductive pattern which is the inspection object (S72). COPYRIGHT: (C)2003,JPO
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