| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment apparatus and a treatment method which get predetermined information from exhaust gas in a chamber and can carry out a highly accurate process control on the basis of the information. SOLUTION: An exhaust line 15 connected with the chamber 13 is composed of a TMP 22 (turbo-molecular pump) and a dry pump 23. The chamber 13 and the TMP 22 are connected by a first exhaust pipe 25 each other, and the TMP 22 and the dry pump 23 are connected by a second exhaust pipe 28 each other. A measuring section 24 monitors the partial pressure of TiCl<SB>4</SB>or NH<SB>4</SB>in the exhaust gas passing through the second exhaust pipe 28. Two kinds of gases are supplied into the chamber 13 for a predetermined time alternately, and, when the partial pressure of one kind of gas supplied in the exhaust gas reduces to the predetermined value, the treatment apparatus 12 starts to supply the other gas. COPYRIGHT: (C)2003,JPO
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