发明名称 |
X-RAY PROCESS AND DEVICE FOR ANALYSING SUBSTANCES AND STRUCTURES |
摘要 |
An X-ray process and device are disclosed for analysing substances and structures. The primary radiation emitted by a radiation source excites a test object to emit secondary radiation, and the secondary radiation is sensed and then evaluated by a receiver. The essential characteristic of the invention is that the passage of the primary or secondary radiation through at least optical elements that consist of a plurality of very thin hollow capillaries, for example made of glass, in which the radiation is paralleled, focused and/or made monochromatic, allows the radiation source or the receiver to be arranged at a distance in space from the test object and low intensity radiation sources to be used. The invention has special application for measuring the thickness of layers, for coupling X-ray fluorescence spectroscopy with microscopy, for designing line optics and for designing a simple but powerful tomograph. A device for continuously measuring in a non-destructive manner the thickness of layers while the layers are produced is illustrated in figure 1. |
申请公布号 |
EP0757790(A1) |
申请公布日期 |
1997.02.12 |
申请号 |
EP19950915111 |
申请日期 |
1995.03.06 |
申请人 |
IFG INSTITUT FUER GERAETEBAU GMBH |
发明人 |
LANGHOFF, NORBERT;KUMAKHOV, MURADIN, ABUBEKIROVICH;GORNY, HANS-EBERHARD |
分类号 |
G01N23/223;G21K1/06;(IPC1-7):G01N23/223 |
主分类号 |
G01N23/223 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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