| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine control means in which hysteresis and drifts do not change due to heating when a piezoelectric element used for sample scanning of a scanning probe microscope is driven at a high speed and provide the scanning probe microscope using the same. SOLUTION: The fine control means comprises the piezoelectric element 101, a heat radiating means 102 for radiating heat generated by the piezoelectric element 101, and a heating means 103 for heating the piezoelectric element 101. The scanning probe microscope is constituted in such a way as to use the fine control means. COPYRIGHT: (C)2003,JPO
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