TARGET/BACKING PLATE ASSEMBLIES

摘要

The invention encompasses PVD target/backing plate assemblies which include a PVD target (30) having a surface, and a bonding layer (40) on the surface. The bonding layer has a different composition than the target surface, and a backing plate (46) is provided to be separated from the PVD target surface by at least the bonding layer. The bonding layer forms a strong diffusion bond to the target. The invention also include methods of forming PVD target/backing plate assemblies. Additionally, the invention includes assemblies in which one or more of titanium, zirconium, and copper is incorporated into a bonding layer between a target and a backing plate in a physical vapor deposition target/backing assembly.