| 摘要 |
<p>A capacitive microelectromechanical ultrasound transducer array with improved efficiency and durability is provided. Efficiency is provided by stacking CMUTs in the range dimension (i.e. away from the face of the transducer). A plurality of chambers (14) and associated membranes (24) are stacked along a range dimension or parallel to the direction of acoustic radiation. Because the CMUT transducer element is stacked, ultrasound is transmitted through the plurality of chambers, amplifying the response of the transducer element (10). Durability is increased within the transducer by filling the chamber (14) with a nongaseous filler. A liquid, polymer, solid or plasma fills the chamber (14) or chambers. The nongaseous filler allows movement of the membrane (24) for transducing between acoustic and electrical energies, but prevents collapse or bottoming out of the membrane.</p> |
