OPTICAL APPARATUS FOR MEASURING THE TWO AND THREE-DIMENSIONAL SHAPE OF AN OBJECT

摘要

Disclosed is a two-dimensional and three-dimensional optical measurement apparatus capable of alternately or selectively measuring two-dimensional sizes and three-dimensional features of an object, and measuring three-dimensional features of an object without using reflected light from a reference plane but only using a projection grating, thereby minimizing reducing measurement error. The apparatus comprises a CCD camera installed at an upper portion in a probe casing for producing a two-dimensional image and a three-dimensional image of an object through an image-forming lens, a first lighting system installed under the CCD camera and illuminating a measurement surface of the object to be measured when measuring a two-dimensional size of the object, a second lighting system installed under the first lighting system and attached to an image pick-up tube provided to the bottom of the probe casing 10 for illuminating corners of the object to be measured when measuring a two-dimensional size of the object, a third lighting system installed in a portion of the probe casing for illuminating the measurement surface of the object through a projection grating, a projection lens, a total reflection mirror and the image pick-up tube when measuring a three-dimensional feature of the object, and a piezoelectric actuator for finely moving the projection grating.