Resonant probe driving arrangement and a scanning probe microscope including such an arrangement

摘要

A drive system is provided for a resonating probe device, such as a scanning probe microscope, wherein the amplitude of the drive signal is controlled by feeding back a phase shifted and amplified component of the amplitude of oscillation of the resonating element. Means are provided for electronically enhancing the quality factor of a resonating probe device when operated in a liquid environment. Such enhancement of the quality factor improves the sensitivity of the probe device.