发明名称 |
Pattern data inspection method and storage medium |
摘要 |
A pattern data inspection method includes the steps of (a) carrying out a logical/sizing process with respect to original pattern data, (b) carrying out a reverse-logical/reverse-sizing process with respect to pattern data subjected to the logical/sizing process, and (c) carrying out a logical process with respect to the original pattern data and pattern data subjected to the reverse-logical/reverse-sizing process, and inspecting the pattern data subjected to the logical/sizing process. |
申请公布号 |
US6598185(B1) |
申请公布日期 |
2003.07.22 |
申请号 |
US20000514151 |
申请日期 |
2000.02.28 |
申请人 |
FUJITSU LIMITED |
发明人 |
MATSUI SHOWGO;TABARA KATSUJI;TAKAHASHI KAZUHIKO;SHIOZAWA KUNIHIKO;OOTANI YOSHIHARU;KATASE SYUZI |
分类号 |
H01L21/82;G03F1/00;G03F1/08;G03F1/68;G03F1/70;G03F7/20;G06F17/50;(IPC1-7):H02H3/05;G06K9/00 |
主分类号 |
H01L21/82 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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