SUBSTRATE TRANSFER APPARATUS WITH IMPROVED FIXED STRUCTURE FOR TRANSFER BRACKET

摘要

PURPOSE: A substrate transfer apparatus with an improved fixed structure for a transfer bracket is provided to improve the maintenance of horizontality as a timing belt progresses by preventing the timing belt from being separated from the transfer bracket. CONSTITUTION: A pulley is rotated by a driving motor. The timing belt(21) is driven while winding around the outer circumferential surface of the pulley. A slit(31a) is formed at both sides of the transfer bracket(30) to make the timing belt inserted into slit. The transfer bracket is composed of a body(31) having a plurality of sawteeth(31b) in the bottom of the slit such that the sawteeth has a shape corresponding to the sawteeth(21a) of the timing belt. A pushing piece(33) is formed on the upper surface of the timing belt inserted into the slit. A fixing bolt(35) is inserted through a through hole(31c) formed in the upper side part of the transfer bracket to push the upper surface of the pushing piece.