| 摘要 |
PROBLEM TO BE SOLVED: To provide a conductive grinding wheel constituted to be capable of easily preventing intrusion of a metal element into the surface of a polishing object material, while exhibiting high conductivity and facilitating extremely high precision grinding and polishing and to provide its manufacturing method. SOLUTION: This conductive grinding wheel 1 comprises a baked body of conductive abrasive grains and inorganic abrasive grains 2 including, at least, a single type of abrasive grains 4 selected from the baked conductive abrasive grains exhibiting the conductivity after baking under the atmosphere. The inorganic abrasive grains 2 may include non-conducting abrasive grains 5. The conductive grinding wheel 1 is manufactured by molding and drying them into a prescribed shape using dispersion slurry including the inorganic abrasive grains 2 by a slurry bed casting method or a pressurized molding method, and then baking it under non-oxygen atmosphere of 1000-2000°C. It is preferable that dispersing agent or organic binder disappearing by the baking is added to the dispersion slurry. COPYRIGHT: (C)2003,JPO
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