| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a lithographic projection apparatus with reduced a problem of outgassing of the material used for conduit, provided to supply utility to a movable element inside a vacuum chamber. <P>SOLUTION: There is provided the lithographic projection apparatus, in which the conduit is provided with a flexible metal bellows, to prevent outgassing due to the vacuum condition within the vacuum chamber, and the movable element may be moved with at least a first degree of freedom. <P>COPYRIGHT: (C)2003,JPO</p> |
