| 摘要 |
PROBLEM TO BE SOLVED: To provide a deflector drive circuit, allowing high-speed responsivity to be compatible with high-voltage output characteristics, and to provide a charged particle beam lithographic device realizing high-precision lithography through its use. SOLUTION: A drive circuit, that is formed in the shape of steps and has high-speed responsivity and high-voltage output characteristics by connecting a front-stage amplification part 101 having gain frequency characteristics of a high direct-current gain and a post-stage amplification part 103 that is set at a low gain via a level shift part 102 is constituted. COPYRIGHT: (C)2003,JPO
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