| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a probe card in low cost and in a short period by manufacturing a probe for a probe card from bulk material of metallic glass. SOLUTION: By a press work, the bulk material of the metallic glass is formed to be a shape in the thickness direction of the probe below crystallization temperature so as to form a probe plate (S10). Then, a contactor is formed at one end of the probe plate (S12), each probe is formed from the probe plate (S14), and the probe is attached and wired to a mainframe substrate (S16). Thereby, the bulk material of the metallic glass is worked, the probe is formed, and the probe card is manufactured. COPYRIGHT: (C)2003,JPO
|
