| 摘要 |
An electrostatic microactuator for a slider in a disc drive is characterised in that it is formed from a single crystal silicon wafer. This provides a microactuator that has very low parasitic capacitance, virtually no mechanical or thermal creep, or mismatch problems as may occur when parts are separately fabricated. It also allows for efficient mass production by allowing for many of the microactuators to be simultaneously formed from the single crystal silicon wafer. The microactuator comprises a first (stationary) part (22) for attachment to a flexure of a head positioning system in a disc drive and a second (movable) part (24) to which a slider is attachable, which is pivotally coupled (42, 44) to the first part. The first and second parts include elongate strips (30, 32) which are interdigitated to provide comb electrodes.
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