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发明名称
VERFAHREN UND VORRICHTUNG ZUR ENDPUNKTBESTIMMUNG BEIM CHEMISCHEN POLIEREN VON HALBLEITERWAFERN
摘要
申请公布号
DE69809437(T2)
申请公布日期
2003.07.17
申请号
DE1998609437T
申请日期
1998.08.19
申请人
MICRON TECHNOLOGY, INC.
发明人
SANDHU, SINGH
分类号
G01B11/06;B24B37/04;B24B49/04;B24B49/12;H01L21/304;H01L21/306;H01L21/66;(IPC1-7):G01B11/06
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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