ONE-BODY BLOCK HEATER FOR HEATING LIQUID DELIVERY SYSTEM

摘要

PURPOSE: An one-body block heater for heating a liquid delivery system is provided to flow evaporated source material, and to prevent an operational error due to the short circuit by connecting a wire only to the first block heater and coupling the first block heater to the second block. CONSTITUTION: A block heater for heating a liquid delivery system includes the first block heater(110) and the second block heater(120). The first block heater includes a thermocouple, an electric wire, and an insertion portion(112). The thermocouple includes a resistance as a heating member in order to measure the temperature of the inside. The electric wire is used for supplying the current to the resistance in order to maintain the temperature of supply lines of the liquid delivery system according to the measured temperature. The insertion portion of the first heater block is coupled to an insertion groove(122) of the second heater block.