摘要 |
A Method of synthesising carbon nano tubes (CNTs) on a catalyst layer formed on a support member, by catalytic deposition of carbon from a gaseous phase, is characterised whereby an ion beam is used prior to, during and/or after formation of said carbon nano tubes for modifying the physical, chemical and/or conductive properties of said carbon nano tubes. The catalyst layer may be deposited on the support member by ion beam deposition. The modifying ion beam may comprise a plurality of sub-beams. The ion beam may comprise particles selected from catalytically active particles Co, Ni, Fe, He, H, Ar, Xe, Kv, O, As or doping agents As, P, B, Ag, Au, Pt or Pd. |