| 摘要 |
PROBLEM TO BE SOLVED: To obtain a surface shape recognizing sensor device with better yields than before. SOLUTION: A calibration circuit 3 is provided for every sensor circuit 2 of each sensor cell 11. By controlling the calibration circuit 3 on an output signal 2A from each sensor circuit 2, the output level of the corresponding sensor circuit 2 is corrected. By this, variations in the detection sensitivity of each sensor circuit 2 caused by process variations are suppressed. |
