| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a high efficient solar battery element having a contact structure where the increase of a serial resistance can be reduced, the disperse of a small number of carriers to an electrode side can be suppressed, and the carrier re-connection of an ohmic contact electrode part can be reduced, and to provide a method for manufacturing this solar battery element. <P>SOLUTION: A plurality of fine protrusions are formed on one main face side of a silicon substrate containing one conductive semiconductor impurity, and inverse conductive semiconductor impurity is contained, and electrodes are formed on one main face side and the other main face side of the silicon substrate so that a solar battery element can be configured. Thus, the inverse conductive semiconductor impurity is contained so that the sheet resistance of the lower part of the electrode of one main face side of the silicon substrate can be turned to be 10-40Ω/square, and a sheet resistance at any part other than the lower part of the electrode of one main face side can be turned to be 60-300Ω/square. <P>COPYRIGHT: (C)2003,JPO</p> |
