| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric actuator that can reduce a speed of migration and a method for sealing it within a metallic enclosure. SOLUTION: The surface of a piezoelectric actuator is covered at a thickness of 3 to 100μm with an insulation material made mainly of at least one element of polyimide, epoxy and polyamide, and the piezoelectric actuator is housed within a metallic enclosure and the metallic enclosure is sealed with a metallic cap. COPYRIGHT: (C)2003,JPO
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