摘要 |
PROBLEM TO BE SOLVED: To provide a flame sensor which is superior in wavelength selectivity. SOLUTION: A flame sensor is equipped with a semiconductor photodetector structure composed of one or more semiconductor layers. A photodetection region is provided to the semiconductor layers in the semiconductor photodetector structure, and a multilayered film optical filter structure composed of a plurality of laminated light transmission layers is laminated directly on the semiconductor photodetector structure in one piece. COPYRIGHT: (C)2003,JPO
|