发明名称 IMPURITY DIFFUSION CONTROL METHOD IN SEMICONDUCTOR HETERO STRUCTURE
摘要 PROBLEM TO BE SOLVED: To prevent an internal loss caused by absorption between valence bands and decrease of carrier mobility in an active area caused by a laser and an impurity diffusion in an amplifier concerning the pollution in an active area although a photoelectron semiconductor device using a p-i-n double hetero structure, as its default, diffuses a p type impurity for a second clad layer in an active layer and a distinction which obviously demarcated between a doped process clad layer and the active area intending an undoped process is tend not to exist. SOLUTION: A semiconductor structure includes a p-i-n double hetero structure, and a high dissoluble layer is provided in the p-i-n double hetero structure to decrease diffusion of the p type impurity from the clad layer to the active layer. The high dissoluble layer is preferable to be formed between the p type doped clad layer and the active layer. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003198064(A) 申请公布日期 2003.07.11
申请号 JP20020354609 申请日期 2002.12.06
申请人 AGILENT TECHNOL INC 发明人 MASSA JOHN;RYDER PAUL;BERRY GRAHAM
分类号 H01S5/323;H01S5/20;H01S5/32;(IPC1-7):H01S5/323 主分类号 H01S5/323
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