| 摘要 |
PROBLEM TO BE SOLVED: To improve the productivity of a device. SOLUTION: A movement standard deviation signal is calculated on a synchronization difference signal that is detected at a specified interval during synchronized movement of a mask and a substrate and frequency analysis and time- series analysis are performed (steps 152 and 164). Then, the presence or absence of a first abnormality independent of the position of the mask and substrate and a second abnormality dependent thereon is judged on the basis of the results (steps 154 and 166). As a result, in case when the first abnormality is present, it, is corrected (step 160) to prevent the occurrence of defective shot, and in case when the second abnormality is present, a device is stopped for appropriate measures such as repair or the like to reduce downtime of the device or to avoid unnecessary exposing operation. Therefore, the operational efficiency of the device can be improved without reducing yield of the device as a final product, improving the productivity thereof. COPYRIGHT: (C)2003,JPO
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