| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor capable of preventing the error detection of angular velocity and reliably detecting the breakage of a wire. <P>SOLUTION: By making gaps between a first drive electrode 22 in a first oscillator 21 of a tuning fork 32 and first and second detecting electrodes 24 and 25 approximately the same, electrostatic capacities which occur between the first drive electrode 22 and the first and second detecting electrodes 24 and 25 are made approximately the same, and the breakage of a wire is reliably detected. <P>COPYRIGHT: (C)2003,JPO |
