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发明名称
SPUTTERTARGET
摘要
申请公布号
EP1325167(A2)
申请公布日期
2003.07.09
申请号
EP20010971886
申请日期
2001.08.07
申请人
CEMECON-CERAMIC METAL COATINGS-DR.-ING. ANTONIUS LEYENDECKER GMBH
发明人
HERMELER, BERND;WUROPULOS, ALEXANDER
分类号
C23C14/34;(IPC1-7):C23C2/00
主分类号
C23C14/34
代理机构
代理人
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