| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating apparatus in which a fluid not containing impurities or bubbles is applied on a material to be coated by removing the impurities or the bubbles or by preventing the generation of them and the lowering in a tact time is prevented. <P>SOLUTION: This coating apparatus 10 possesses a tank 90, a suction flow passage 21, an inlet valve 22, a feed pump 20, a carrying flow passage 50, a filter 40, a filter discharge mechanism 70, a dispenser pump 30, a discharge flow passage 60 and an outlet valve 62. The feed pump has a carrying chamber 25 capable of fixing a volume and a carrying chamber discharge part 80 for discharging bubbles and a fluid. The carrying chamber discharge part has a carrying chamber discharge valve 82. The dispenser pump has a distribution camber 33 capable of fixing the volume. The filter discharge mechanism 70 has a 1st discharge part 71 connected to a filter chamber 41 and a 2nd discharge part 72 connected to a filter outlet 42. <P>COPYRIGHT: (C)2003,JPO |
