发明名称 |
Active vibration isolation system having pressure control |
摘要 |
An active vibration isolation system includes a pneumatic control system and an electronic control system. The pneumatic control system supports a mass sensitive to vibration and isolates the mass from high frequency external disturbances. The electronic control system isolates the mass from low frequency external disturbances. The pneumatic control system includes a compliance chamber filled with a fluid to pneumatically support the mass, apparatus for directly measuring a pressure level in the compliance chamber, and apparatus for controlling the pressure level to minimize the effects of pressure variation in the compliance chamber. The measuring apparatus includes an instrument to measure an absolute pressure level of the compliance chamber or an instrument to measure a differential pressure level between the compliance chamber and a reference chamber having a predetermined pressure level.
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申请公布号 |
US6590639(B1) |
申请公布日期 |
2003.07.08 |
申请号 |
US20000663184 |
申请日期 |
2000.09.15 |
申请人 |
NIKON CORPORATION |
发明人 |
YUAN BAUSAN;BINNARD MICHAEL;LEE MARTIN |
分类号 |
G03F7/20;(IPC1-7):G03B27/62;G03B27/42;F16M1/00;F16M13/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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