| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrapure water supply apparatus capable of supplying ultrapure water by effectively removing a long chain amine, which is widely used in a factory for manufacturing electronic parts such as a semiconductor and a liquid crystal, for medical water, a in an atomic power plant. SOLUTION: The ultrapure water supply apparatus is equipped with a long chain amine removing means. COPYRIGHT: (C)2003,JPO
|
