发明名称 Small footprint direct drive mechanical positioning stage
摘要 A small footprint mechanical positioning stage capable of operating in two perpendicular orientations comprises a base plate, a carriage plate, linear bearings, a brushless linear motor, and a linear encoder. The linear bearings, the linear motor, and the encoder scale are all parallel to the direction of travel of the positioning stage.
申请公布号 US6588081(B2) 申请公布日期 2003.07.08
申请号 US20010862635 申请日期 2001.05.21
申请人 AEROTECH, INC. 发明人 BOTOS STEPHEN J.;FAVERO BRIAN L.
分类号 B23Q1/48;B23Q5/28;G02B6/38;G02B6/42;(IPC1-7):B25B27/14;B23Q1/25 主分类号 B23Q1/48
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