发明名称 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
摘要 PURPOSE: A method for fabricating a semiconductor device is provided to reduce a time interval and the number of processes and to decrease the number and kinds of etch solutions by performing a wet etch process using a constant voltage method before multi metal layers are formed and by performing a selective etch process regarding each layer of the multi metal layers. CONSTITUTION: The selective etch process is performed on each layer of an under barrier metal(UBM) layer through a constant voltage method in a wafer level chip size package(WLCSP) process for forming the semiconductor device.
申请公布号 KR20030058627(A) 申请公布日期 2003.07.07
申请号 KR20010089151 申请日期 2001.12.31
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE, U JIN
分类号 H01L21/306;(IPC1-7):H01L21/306 主分类号 H01L21/306
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