| 摘要 |
PURPOSE: An etching device is provided to simplify the management by mounting optical sensors for sensing the flow meter of an etching solution and keeping the optical sensors clean by a deionized water tube, thereby preventing the accumulation of sludge. CONSTITUTION: An etching device includes an etching tub(101) for receiving an etching solution, optical sensors(103a,103b) provided to an inner wall of the etching tub for sensing the flow meter of the etching solution supplied to the etching tub, and a deionized tube(105) in parallel to the inner wall of the etching tub for cleaning the optical sensors. The etching tub is mounted with guides(106) on a bottom surface for supporting a porous plate(107) which supports a glass substrate, and a bubble plate(108) supported by the guides in parallel to the porous plate.
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