| 摘要 |
PROBLEM TO BE SOLVED: To quickly generate a large amount of ozone by a plurality of ozonizers, to disperse risk of accumulation of liquid ozone since the liquid ozone can be separately accumulated in a plurality of generating chambers, and to cancel the difference in the amount of accumulation of the liquid ozone between the generating chambers. SOLUTION: In an oxide film-forming apparatus 10 having a treating chamber 12 for treating a wafer 1, a plurality of ozonizers 29, 36, and 43 for generating ozone from oxygen, a plurality of generating chambers 21, 22, and 23 that are connected to the ozonizers each, liquify the ozone that is generated by the ozonizers for generating liquid ozone, and vaporize the liquid ozone for generating ozone having a high degree of purity, ozone supply piping 50 for supplying the ozone having a high degree of purity that is generated in the generating chambers to the treating chamber 12, generating chambers 21, 22, and 23 are connected one another with tie pipes 60 and 62 where cutoff valves 61 and 63 are included. COPYRIGHT: (C)2003,JPO
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