PIEZOELECTRIC CANTILEVER HAVING HIGH ASPECT RATIO TIP AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A piezoelectric cantilever having a high aspect ratio tip and a method for manufacturing the same are provided to prevent the cantilever from bonding and prevent high voltage from being applied to upper and lower electrodes and a piezoelectric material. CONSTITUTION: A high aspect ratio tip(113) is provided. A support(114) is vertically connected with the high aspect ratio tip. A stress correcting film(116) is formed on the tip and the support. A lower electrode(118), a bonding pattern layer(119), a piezoelectric material layer, and an upper electrode(124) are formed on an open area of a cantilever and the stress correcting film in order. A light transmissive case(126) covers the whole structure at an upper part of the support and a part to be connection with wires(128) of the cantilever is open. The wires are connected to the lower electrode and the upper electrode through the open part of the light transmissive case. The light transmissive case is bonded with the bonding pattern layer, so that the lower and upper electrodes and the case are separated in bonding the cantilever by using the lower and upper electrodes.