| 摘要 |
PURPOSE: A sputtering device is provided to extend the life span of a mask and to eliminate foreign substances. CONSTITUTION: A mask(52) contains a support(66), a mask cap for fixing(62), an anti-adhesive plate and a protrusion. The support stands the mask next to a target. The mask cap fixes an equipment in the back of the mask and the mask. The anti-adhesive plate arranges a space to form a plasma. The protrusion is formed on the anti-adhesive plate. A portion to be layered layering materials is formed toward a first face(60a) of the protrusion. Therefore, many layering materials are collected without falling onto a substrate.
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