METAL WIRE PHOTOLITHOGRAPHY PROCESS BY USING ALUMINUM METAL

摘要

PURPOSE: A metal wire photolithography process by using aluminum metals is provided to reduce the number of processes and TAT(Turn Around Time) and to save the cost of materials. CONSTITUTION: In a process for patterning an aluminum metal such as pure aluminum or an aluminum alloy, a material for collectively removing the aluminum metal(122) and a photoresist material(124) is used for the rework of a photolithography process. The photolithography process includes the processes of exposure, development and etching by using the photoresist. Herein, the material for collectively removing the aluminum metal and photoresist contains 5wt%-40wt% of mono ethanol amine and 2wt%-10wt% of tetra methyl ammonium hydroxide.