发明名称 IMAGE SENSOR HAVING TRENCH-TYPE ISOLATION
摘要 PURPOSE: An image sensor with trench-type isolation is provided to be capable of minimizing failure due to well formation and increasing capacitance of a photodiode. CONSTITUTION: A plurality of photodiodes(PD) is formed in a semiconductor layer of the first conductive type. A well(P-well) of the first conductive type is formed in the semiconductor layer located between the photodiodes(PD). A filed insulating layer(Fox) of a trench structure is formed in the semiconductor layer located between the photodiode(PD) and the well(P-well). At this time, the depth of the well is same to the depth of the field insulating layer(Fox).
申请公布号 KR20030056322(A) 申请公布日期 2003.07.04
申请号 KR20010086522 申请日期 2001.12.28
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KO, HO SUN
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
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