| 摘要 |
A semiconductor laser with an equilateral triangle micro optical resonator has an output waveguide connected to the resonator for realizing directional emission, and the laser wafer structure is the slab waveguide constituted by lower cladding layer, active region and the upper cladding layer. The outer region of the equilateral triangle is etched to the lower cladding layer or substrate, while the unetched equilateral triangle region is used as the resonator, and the triangular sides serve as the reflecting mirrors. On one of the vertices or the sides of the triangle resonator connected or coupled an output waveguide can form an edge emission semiconductor laser and array having directive light emission. If the output waveguide is intersected with an incline, enabling the output light to deflect 90° then surface emission output can be acquired, thereby a surface emission semiconductor laser and array is produced, and a multi-wavelength semiconductor laser or array can be made by the equilateral triangle micro optical resonators of various dimensions.
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