发明名称 SOI DEVICE WITH DIFFERENT SILICON THICKNESSES
摘要 <p>A method of manufacturing a semiconductor device includes providing a silicon semiconductor layer (14) over an insulating layer (12), and partially removing a first portion of the silicon layer (14). The silicon layer (14) includes the first portion and a second portion, and a thickness of the second portion is greater than a thickness of the first portion. Initially, the first and second portions of the silicon layer (14) initially can have the same thickness. A semiconductor device is also disclosed.</p>
申请公布号 WO2003054966(A1) 申请公布日期 2003.07.03
申请号 US2002041102 申请日期 2002.12.19
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