发明名称 Hybrid substrate and method for fabricating the same
摘要 A hybrid substrate, i.e., a substrate fabricated from different materials, and method for fabricating the same are presented. The hybrid substrate is configured for fabricating more than two different devices thereon, has a high thermal conductivity, and is configured for patterning interconnects thereon for interconnecting the different devices fabricated on the hybrid substrate.
申请公布号 US2003124327(A1) 申请公布日期 2003.07.03
申请号 US20020038172 申请日期 2002.01.03
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 HSU LOUIS L.;WANG LI-KONG
分类号 H01L21/20;H01L27/12;(IPC1-7):B32B9/00 主分类号 H01L21/20
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