| 摘要 |
PROBLEM TO BE SOLVED: To provide a plating apparatus in which a plating liquid is hardly deteriorated. SOLUTION: This plating apparatus is equipped with a plating tank 1 for plating an object to be treated, a recovery tank 5 arranged so as to surround the plating tank 1, and a storage tank 2 arranged at a position lower than both the plating tank 1 and the recovery tank 5. The storage tank 2 is connected to the plating tank 1 by a liquid-lifting pipe 3 via a pump 6. At a position above the storage tank 2 and below the recovery tank 5, a buffer tank 7 is arranged, to which the recovery tank 5 is connected by a reflux pipe 8. The buffer tank 7 is connected to the storage tank 2 by a reflux pipe 4 via a valve 13. At the side of the buffer tank 7, a liquid level sensor 10 for obtaining information on the liquid level of the plating liquid in the buffer tank 7 is arranged, and the output signal of the liquid level sensor 10 is inputted into a control unit 14 which opens and closes the valve 13 basing upon the output signal of the liquid level senor 10. COPYRIGHT: (C)2003,JPO
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